US Patent Issued to TAIWAN SEMICONDUCTOR MANUFACTURING on June 30 for "Method of monitoring tool" (Taiwanese Inventors)

ALEXANDRIA, Va., July 16 -- United States Patent no. 12,672,509, issued on June 30, was assigned to TAIWAN SEMICONDUCTOR MANUFACTURING Co. LTD. (Hsinchu, Taiwan).

"Method of monitoring tool" was invented by Hom-Chung Lin (Taichung City, Taiwan), Chi-Ying Chang (Taichung City, Taiwan), Jih-Churng Twu (Hsinchu County, Taiwan), Chin-Yun Chen (Taipei City, Taiwan), Yi-Ting Chang (Tainan City, Taiwan) and Feng-Yu Chen (Taichung City, Taiwan).

According to the abstract* released by the U.S. Patent & Trademark Office: "A method includes transferring a tool monitoring device over a load port of a tool. A bottom of the tool monitoring device has a plurality of holes, and the load port comprises a plurality of pins at a top surface of the load port...