ALEXANDRIA, Va., July 15 -- United States Patent no. 12,666,929, issued on June 23, was assigned to TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD. (Hsinchu, Taiwan).
"System and method for detecting defects on a wafer and related non-transitory computer-readable medium" was invented by Shih-Chang Wang (Tainan City, Taiwan), Hsiu-Hui Huang (Hsinchu City, Taiwan), Feng-Ju Chang (Hsinchu City, Taiwan), Yen-Fong Chan (Hsinchu County, Taiwan), Chien-Huei Chen (Kaohsiung City, Taiwan) and Xiaomeng Chen (Hsinchu County, Taiwan).
According to the abstract* released by the U.S. Patent & Trademark Office: "A system configured to detect defects on a wafer is provided. The system includes an inspection subsystem configured to acquire scan data of a ...