US Patent Issued to Taiwan Semiconductor Manufacturing on Feb. 17 for "Semiconductor processing tool and methods of operation" (Taiwanese Inventor)

ALEXANDRIA, Va., Feb. 17 -- United States Patent no. 12,555,759, issued on Feb. 17, was assigned to Taiwan Semiconductor Manufacturing Co. Ltd. (Hsinchu, Taiwan).

"Semiconductor processing tool and methods of operation" was invented by Yen-Liang Lin (Yilan County, Taiwan).

According to the abstract* released by the U.S. Patent & Trademark Office: "Some implementations herein provide a PVD tool that includes a rotational magnet system configured to generate a magnetic field in a processing chamber of the PVD tool. The magnetic field may be used to control the distribution and/or flow of material from a target structure in the processing chamber to a semiconductor substrate in the processing chamber. The rotational magnet system includes a ...