US Patent Issued to TAIWAN SEMICONDUCTOR MANUFACTURING on Aug. 4 for "Simultaneous multi-bandwidth optical inspection of semiconductor devices" (Taiwanese Inventors)

ALEXANDRIA, Va., Aug. 5 -- United States Patent no. 12,701,970, issued on Aug. 4, was assigned to TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD. (Hsinchu, Taiwan).

"Simultaneous multi-bandwidth optical inspection of semiconductor devices" was invented by Shih-Chang Wang (Tainan, Taiwan), Hsiu-Hui Huang (Hsinchu, Taiwan), Hung-Yi Chung (Taoyuan, Taiwan), Chien-Huei Chen (Kaohsiung, Taiwan) and Xiaomeng Chen (Hsinchu, Taiwan).

According to the abstract* released by the U.S. Patent & Trademark Office: "A method of qualifying semiconductor wafer processing includes: illuminating a semiconductor wafer simultaneously with source light having wavelengths in a plurality of wavebands, including at least a first waveband a second waveband, the sec...