ALEXANDRIA, Va., Aug. 5 -- United States Patent no. 12,698,201, issued on Aug. 4, was assigned to TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD. (Hsinchu, Taiwan).
"Semiconductor structure and manufacturing method for the same" was invented by Yuan-Chih Hsieh (Hsinchu City, Taiwan) and Hung-Hua Lin (Taipei City, Taiwan).
According to the abstract* released by the U.S. Patent & Trademark Office: "The present disclosure provides a micro electro mechanical system (MEMS) structure, including a device substrate having a first region and a second region different from the first region, a capping substrate bonded over the device substrate, a first cavity in the first region and between the device substrate and capping substrate, wherein the fir...