ALEXANDRIA, Va., April 15 -- United States Patent no. 12,599,983, issued on April 14, was assigned to Taiwan Semiconductor Manufacturing Co. Ltd. (Hsinchu, Taiwan).
"Semiconductor processing tool and methods of operation" was invented by Yu-Young Wang (New Taipei City, Taiwan), Chun-Min Lin (Hsinchu City, Taiwan), Min-Yu Wu (Hsinchu City, Taiwan) and Chih-Jen Wu (Chu-Dong Town, Taiwan).
According to the abstract* released by the U.S. Patent & Trademark Office: "A zone heater assembly of a reflow solder tool includes a gas deflector having a single-layer structure. The single-layer structure may include one or more gas-permeating patterns through which a process gas is to flow from one or more gas outlets to a gas exhaust of the zone heate...