US Patent Issued to Taiwan Semiconductor Manufacturing on April 14 for "Contact etch stop layer for a pixel sensor" (Taiwanese Inventors)

ALEXANDRIA, Va., April 15 -- United States Patent no. 12,604,552, issued on April 14, was assigned to Taiwan Semiconductor Manufacturing Co. Ltd. (Hsinchu, Taiwan).

"Contact etch stop layer for a pixel sensor" was invented by Cheng-Hsien Chen (Tainan City, Taiwan), Yung-Hsiang Chen (Tainan City, Taiwan), Chia Hao Li (Tainan City, Taiwan), Yu-Lung Yeh (Kaohsiung City, Taiwan) and Yen-Hsiu Chen (Tainan City, Taiwan).

According to the abstract* released by the U.S. Patent & Trademark Office: "One or more semiconductor processing tools may deposit a contact etch stop layer on a substrate. In some implementations, the contact etch stop layer is comprised of less than approximately 12 percent hydrogen. Depositing the contact etch stop layer may...