US Patent Issued to Synopsys on March 17 for "Creating scanning plans for improving accuracy and resolution of optical wafer inspection" (Indian, American Inventors)

ALEXANDRIA, Va., March 17 -- United States Patent no. 12,579,637, issued on March 17, was assigned to Synopsys Inc. (Sunnyvale, Calif.).

"Creating scanning plans for improving accuracy and resolution of optical wafer inspection" was invented by Ankush Bharati Oberai (Fremont, Calif.), Rajesh Ramesh Sahani (Mumbai, India) and Shivraj Bhagwat Patil (Mumbai, India).

According to the abstract* released by the U.S. Patent & Trademark Office: "A circuit design may be partitioned into a set of regions. Regions in the set of regions that are substantially identical to one another may be identified and overlaps between the set of regions may be determined. A scanning plan may be created based on the set of regions, the regions in the set of region...