US Patent Issued to Sumitomo Chemical on Sept. 1 for "Salt, quencher, resist composition and method for producing resist pattern" (Japanese Inventors)

ALEXANDRIA, Va., Sept. 1 -- United States Patent no. 12,724,343, issued on Sept. 1, was assigned to Sumitomo Chemical Co. Ltd. (Tokyo).

"Salt, quencher, resist composition and method for producing resist pattern" was invented by Katsuhiro Komuro (Osaka, Japan), Yuki Takahashi (Osaka, Japan) and Koji Ichikawa (Osaka, Japan).

According to the abstract* released by the U.S. Patent & Trademark Office: "A salt represented by formula (I), a quencher, and a resist composition including the same: wherein at least one of R4, R5 and R6 represents-X2-R7, X2 represents *-CO-O-, *-O-CO-or --O-CO-O-, and * represents a bonding site to the benzene ring, and R7 represents a hydrocarbon group including a cyclic hydrocarbon group having 3 to 18 carbon atom...