ALEXANDRIA, Va., March 31 -- United States Patent no. 12,590,760, issued on March 31, was assigned to SPTS Technologies Ltd. (Newport, Great Britain).
"Spin rinse dryer with improved drying characteristics" was invented by Trevor Thomas (Newport, Great Britain) and Martin Ayres (Newport, Great Britain).
According to the abstract* released by the U.S. Patent & Trademark Office: "A spin rinse dryer for treating a substrate has an enclosure, a rotatable support for supporting the substrate, a rotatable member located within the enclosure above the rotatable support, and a drive for rotating the rotatable member. During cleaning of the wafer, liquid that splashes up from the wafer will strike the rotatable member, rather than the upper wall o...