US Patent Issued to SPTS Technologies on Feb. 17 for "Plasma producing apparatus" (British Inventors)

ALEXANDRIA, Va., Feb. 17 -- United States Patent no. 12,555,743, issued on Feb. 17, was assigned to SPTS Technologies Ltd. (Newport, Great Britain).

"Plasma producing apparatus" was invented by Stephen R Burgess (Gwent, Great Britain), Anthony Paul Wilby (Bristol, Great Britain), Clive L Widdicks (Bristol, Great Britain), Ian Moncrieff (Wotton-under-Edge, Great Britain) and P Densley (Newport, Great Britain).

According to the abstract* released by the U.S. Patent & Trademark Office: "A plasma producing apparatus for plasma processing a substrate Includes a chamber having an interior surface, a plasma production device for producing an inductively coupled plasma within the chamber, a substrate support for supporting the substrate during pl...