US Patent Issued to Soitec, Commissariat A L'energie Atomique Et Aux Energies on Aug. 25 for "Method for manufacturing a structure comprising a plurality of membranes overhanging cavities" (French Inventors)

ALEXANDRIA, Va., Aug. 25 -- United States Patent no. 12,715,764, issued on Aug. 25, was assigned to Soitec (Bernin, France) and Commissariat A L'energie Atomique Et Aux Energies (Paris).

"Method for manufacturing a structure comprising a plurality of membranes overhanging cavities" was invented by Bruno Ghyselen (Bernin, France), Thierry Salvetat (Grenoble Cedex, France), Guillaume Berre (Grenoble Cedex, France) and Francois Rieutord (Grenoble Cedex, France).

According to the abstract* released by the U.S. Patent & Trademark Office: "A method for manufacturing a structure comprising membranes overhanging cavities, comprises: a) forming cavities opening at a front face of a support substrate, the cavities having a depth and an area, and be...