US Patent Issued to Skyworks Solutions on Sept. 1 for "MEMS sensor with a thin region" (Japanese Inventor)

ALEXANDRIA, Va., Sept. 1 -- United States Patent no. 12,726,773, issued on Sept. 1, was assigned to Skyworks Solutions Inc. (Irvine, Calif.).

"MEMS sensor with a thin region" was invented by Siarhei Dmitrievich Barsukou (Takarazuka, Japan).

According to the abstract* released by the U.S. Patent & Trademark Office: "A piezoelectric microelectromechanical systems microphone is provided comprising a sensor, an anchor region at which the sensor is supported by a substrate, a first region of the sensor adjacent to the anchor region, the first region having at least one piezoelectric layer and at least one electrode, and a second region of the sensor, the second region being adjacent to the first region, having at least one piezoelectric layer ...