US Patent Issued to Skyworks Solutions on March 3 for "Acoustic devices with residual stress compensation" (Japanese Inventor)

ALEXANDRIA, Va., March 3 -- United States Patent no. 12,568,337, issued on March 3, was assigned to Skyworks Solutions Inc. (Irvine, Calif.).

"Acoustic devices with residual stress compensation" was invented by Siarhei Dmitrievich Barsukou (Takarazuka, Japan).

According to the abstract* released by the U.S. Patent & Trademark Office: "An acoustic sensor (e.g., for use in a piezoelectric MEMS microphone) includes a substrate and a cantilever beam attached to the substrate. The cantilever beam has a proximal portion attached to the substrate and extends to a distal tip at a free end thereof. The cantilevered beam has a multilayer structure with a plurality of piezoelectric layers and a plurality of metal electrode layers, at least a portion...