US Patent Issued to SK hynix on June 30 for "Semiconductor fabrication apparatus" (South Korean Inventor)

ALEXANDRIA, Va., July 16 -- United States Patent no. 12,672,500, issued on June 30, was assigned to SK hynix Inc. (Gyeonggi-do, South Korea).

"Semiconductor fabrication apparatus" was invented by Doo Hyun Jeong (Gyeonggi-do, South Korea).

According to the abstract* released by the U.S. Patent & Trademark Office: "A semiconductor fabrication apparatus may include a plurality of refrigerant suppliers, a plurality of mixers, a plurality of chambers and a common reservoir. The mixers may commonly receive a refrigerant from the refrigerant suppliers. The chambers may be connected to one of the mixers. The common reservoir may supply the refrigerant to the refrigerant suppliers. The common reservoir may collect the refrigerant from the chambers...