ALEXANDRIA, Va., April 7 -- United States Patent no. 12,596,062, issued on April 7, was assigned to SILTRONIC AG (Munich).
"Method for classifying unknown particles on a surface of a semi-conductor wafer" was invented by Sebastian Andres (Marktl, Germany), Robert Hinterleuthner (Burghausen, Germany) and Rudolf Rupp (Oberjulbach, Germany).
According to the abstract* released by the U.S. Patent & Trademark Office: "Unknown particles on a surface of a semiconductor wafer are classified by applying a range of particles of known chemical composition and different sizes onto a test wafer, measuring the sizes of a plurality of the particles and spectrally analyzing a makeup of the particles by energy-dispersive x-ray spectroscopy, followed by as...