US Patent Issued to SHINKO ELECTRIC INDUSTRIES on Aug. 25 for "Electrostatic chuck and substrate fixing device" (Japanese Inventors)

ALEXANDRIA, Va., Aug. 25 -- United States Patent no. 12,721,101, issued on Aug. 25, was assigned to SHINKO ELECTRIC INDUSTRIES Co. LTD. (Nagano, Japan).

"Electrostatic chuck and substrate fixing device" was invented by Masahiro Sunohara (Nagano, Japan) and Tatsuya Nakamura (Nagano, Japan).

According to the abstract* released by the U.S. Patent & Trademark Office: "An electrostatic chuck includes a first base body, a first adhesive layer, a second base body stacked on the first base body with the first adhesive layer interposed therebetween, and an electrostatic electrode embedded in the second base body. The first base body is made of aluminum oxide ceramics. The second base body is made of aluminum oxide ceramics with a higher purity of ...