US Patent Issued to SHIBAURA MECHATRONICS on May 19 for "Cleaning apparatus" (Japanese Inventor)

ALEXANDRIA, Va., May 19 -- United States Patent no. 12,629,730, issued on May 19, was assigned to SHIBAURA MECHATRONICS Corp. (Kanagawa, Japan).

"Cleaning apparatus" was invented by Yuichi Imaoka (Kanagawa, Japan).

According to the abstract* released by the U.S. Patent & Trademark Office: "According to one embodiment of the present disclosure, a cleaning apparatus includes a plurality of rollers that rotates a substrate in contact with an outer periphery of the substrate; a rotation mechanism including a motor that rotates the rollers about the rotation shaft; a cover interposed between the rollers and the rotation mechanism to cover the rotation mechanism; an ejection port provided in the cover and that ejects gas between the cover and t...