US Patent Issued to Semes on Sept. 8 for "Substrate processing equipment and method of driving substrate processing equipment" (South Korean Inventors)

ALEXANDRIA, Va., Sept. 8 -- United States Patent no. 12,731,965, issued on Sept. 8, was assigned to Semes Co. Ltd. (Chungcheongnam-do, South Korea).

"Substrate processing equipment and method of driving substrate processing equipment" was invented by Jae Min Kim (Gunpo-si, South Korea) and Gun Min Lee (Hongseong, South Korea).

According to the abstract* released by the U.S. Patent & Trademark Office: "A substrate processing equipment and a method of driving the substrate processing equipment, which automatically cut off power supplied to a main circuit breaker and a branch circuit breaker when an operator inspects a process chamber or a power supply system. The substrate processing equipment for processing a substrate includes: a process ...