ALEXANDRIA, Va., Sept. 8 -- United States Patent no. 12,733,439, issued on Sept. 8, was assigned to SEMES Co. Ltd. (Cheonan-si, South Korea).
"Apparatus for treating substrate and method for treating substrate" was invented by Chang Jun Park (Pyeongtaek-si, South Korea).
According to the abstract* released by the U.S. Patent & Trademark Office: "The present invention provides an apparatus for treating a substrate. The apparatus for treating a substrate comprises: a first module; and a treating module configured to treat the substrate, and the first module includes: a load port on which a container having the substrate accommodated therein is placed; a transfer unit having a hand that transfers the substrate between the load port and the t...