ALEXANDRIA, Va., Sept. 30 -- United States Patent no. 12,749,662, issued on Sept. 29, was assigned to Semes Co. Ltd. (Chungcheongnam-do, South Korea).
"Supporting unit and apparatus for treating substrate" was invented by Tae Dong Park (Hwaseong-si, South Korea) and Chung Woo Lee (Suwon-si, South Korea).
According to the abstract* released by the U.S. Patent & Trademark Office: "The inventive concept provides a support unit for supporting a substrate. The support unit for supporting the substrate includes a first plate; heating elements provided at the first plate for controlling a temperature of respective region of the substrate; a power supply module configured to generate at least two powers having a different frequency; a power line ...