ALEXANDRIA, Va., Sept. 24 -- United States Patent no. 12,743,020, issued on Sept. 22, was assigned to Semes Co. Ltd. (Chungcheongnam-do, South Korea).
"Apparatus for treating substrate and method for treating a substrate" was invented by Soo Bin Yong (Cheonan-si, South Korea) and Min Jung Park (Cheonan-si, South Korea).
According to the abstract* released by the U.S. Patent & Trademark Office: "The inventive concept provides a substrate treating method. The substrate treating apparatus includes supplying a first liquid to a rotating substrate to treat a substrate; and supplying a second liquid which is different from the first liquid to the rotating substrate to coat the substrate with the second liquid, and wherein a rotation direction o...