US Patent Issued to SEMES on Oct. 20 for "Substrate transfer unit and substrate treatment apparatus including the same" (South Korean Inventors)

ALEXANDRIA, Va., Oct. 21 -- United States Patent no. 12,772,786, issued on Oct. 20, was assigned to SEMES Co. LTD. (Chungcheongnam-do, South Korea).

"Substrate transfer unit and substrate treatment apparatus including the same" was invented by Nam Ki Hong (Chungcheongnam-do, South Korea), Eun Ju Lee (Chungcheongnam-do, South Korea) and Gui Hun Kim (Chungcheongnam-do, South Korea).

According to the abstract* released by the U.S. Patent & Trademark Office: "A substrate transfer unit is provided. The substrate transfer unit includes: a rail part having a length in a horizontal direction; a vertical part moving along the rail part, guiding the vertical movement of a robot, which transfers a substrate, and having, formed therein, first flow pa...