ALEXANDRIA, Va., Oct. 21 -- United States Patent no. 12,770,836, issued on Oct. 20, was assigned to SEMES Co. LTD. (Chungcheongnam-Do, South Korea).
"Apparatus for treating substrate" was invented by Hanglim Lee (Cheonan-si, South Korea), Minyoung Kim (Hwaseong-si, South Korea) and Jihoon Park (Seoul, South Korea).
According to the abstract* released by the U.S. Patent & Trademark Office: "Disclosed is a substrate treating apparatus that includes an index module including a plurality of load ports on each of which a carrier having a substrate received therein is placed and a transfer frame in which an index robot that transfers the substrate is installed, a process module that is connected with the index module and that includes process c...