ALEXANDRIA, Va., May 26 -- United States Patent no. 12,636,669, issued on May 26, was assigned to Semes Co. LTD. (Cheonan-si, South Korea).
"Liquid supply unit and substrate treating apparatus" was invented by Soon Hyun Kim (Cheonan-si, South Korea) and Kyung Min Kim (Cheonan-si, South Korea).
According to the abstract* released by the U.S. Patent & Trademark Office: "The inventive concept provides a liquid supply unit which may implement a rotation (swing) of a plurality of nozzles by a single motor, and which has simple structure. The liquid supply unit includes a first nozzle, a second nozzle, a motor, and a first belt. The first nozzle includes a first supply pipe for supplying a liquid, a first rotation part provided at a bottom part...