US Patent Issued to SEMES on May 19 for "Spray unit and substrate treatment apparatus including the same" (South Korean Inventors)

ALEXANDRIA, Va., May 19 -- United States Patent no. 12,629,727, issued on May 19, was assigned to SEMES Co. LTD. (Chungcheongnam-do, South Korea).

"Spray unit and substrate treatment apparatus including the same" was invented by Myung A Jeon (Chungcheongnam-do, South Korea), Young Seop Choi (Chungcheongnam-do, South Korea), Young Jin Kim (Chungcheongnam-do, South Korea), Eun Hyeok Choi (Chungcheongnam-do, South Korea), Bok Kyu Lee (Chungcheongnam-do, South Korea), Je Myung Cha (Chungcheongnam-do, South Korea) and Kyu Hwan Chang (Chungcheongnam-do, South Korea).

According to the abstract* released by the U.S. Patent & Trademark Office: "A spray unit in which a plurality of nozzle heads are integrally coupled and a substrate treatment appar...