US Patent Issued to SEMES on May 12 for "Substrate treating apparatus" (South Korean Inventors)

ALEXANDRIA, Va., May 12 -- United States Patent no. 12,626,890, issued on May 12, was assigned to SEMES Co. LTD. (Cheonan-si, South Korea).

"Substrate treating apparatus" was invented by Jin Hee Hong (Hwaseong-si, South Korea), Yun Sang Kim (Seongnam-si, South Korea), Min Sung Jeon (Osan-si, South Korea), Soon-Cheon Cho (Pyeongtaek-si, South Korea), Sung Min Choi (Osan-si, South Korea) and Jung Hoon Park (Sejong-si, South Korea).

According to the abstract* released by the U.S. Patent & Trademark Office: "The inventive concept provides a substrate treating apparatus. The substrate treating apparatus includes a chamber having a treating space therein; a support unit disposed within the treating space and configured to support a substrate; a...