US Patent Issued to SEMES on May 12 for "Gas supply unit and substrate processing apparatus including same" (South Korean Inventors)

ALEXANDRIA, Va., May 12 -- United States Patent no. 12,623,247, issued on May 12, was assigned to SEMES Co. LTD. (Cheonan-si, South Korea).

"Gas supply unit and substrate processing apparatus including same" was invented by Eunwoo Park (Gyeongsan-si, South Korea), Jongwha Kang (Cheonan-si, South Korea), Wooram Lee (Seoul, South Korea), Sung-gyu Lee (Cheonan-si, South Korea), Dongwoon Park (Seoul, South Korea), Yongdae Cho (Namyangju-si, South Korea), Donghoon Kang (Bucheon-si, South Korea) and Kisang Eum (Cheonan-si, South Korea).

According to the abstract* released by the U.S. Patent & Trademark Office: "Provided is an apparatus for processing a substrate. The substrate processing apparatus includes: a processing unit processing a substr...