US Patent Issued to SEMES on March 31 for "Substrate treating apparatus and substrate treating method" (South Korean Inventors)

ALEXANDRIA, Va., March 31 -- United States Patent no. 12,591,175, issued on March 31, was assigned to SEMES Co. LTD. (Chungcheongnam-Do, South Korea).

"Substrate treating apparatus and substrate treating method" was invented by Hyun Yoon (Gyeonggi-do, South Korea), Ki Hoon Choi (Chungcheongnam-do, South Korea), Hyo Won Yang (Seoul, South Korea), Tae Hee Kim (Gyeonggi-do, South Korea) and In Ki Jung (Gyeonggi-do, South Korea).

According to the abstract* released by the U.S. Patent & Trademark Office: "Disclosed is a substrate treating apparatus including a support unit that supports and rotates a substrate, a heating unit including a laser irradiator that irradiates laser light in a pattern formed in the substrate, a movement module that c...