ALEXANDRIA, Va., March 31 -- United States Patent no. 12,593,658, issued on March 31, was assigned to SEMES Co. LTD. (Chungcheongnam-do, South Korea).
"Substrate treating apparatus" was invented by Jong Seok Seo (Chungcheongnam-do, South Korea) and Sun Sup Lim (Gyeonggi-do, South Korea).
According to the abstract* released by the U.S. Patent & Trademark Office: "A substrate treating apparatus includes: a chill plate; a first support part installed on the chill plate and including a first tip having a first height; and a second support part installed on the chill plate and having a height changed according to a temperature, wherein at a first temperature, a maximum height of the second support part becomes equal to or lower than a height o...