US Patent Issued to SEMES on March 31 for "Substrate processing apparatus and method" (South Korean Inventors)

ALEXANDRIA, Va., March 31 -- United States Patent no. 12,592,368, issued on March 31, was assigned to SEMES Co. LTD. (Chungcheongnam-Do, South Korea).

"Substrate processing apparatus and method" was invented by Sunjoo Park (Chungcheongnam-do, South Korea), Hyunjong Shim (Chungcheongnam-do, South Korea), Sangmin Mun (Chungcheongnam-do, South Korea), Kyungseok Min (Chungcheongnam-do, South Korea), Hwan Jung (Chungcheongnam-do, South Korea) and Nayeon Lee (Chungcheongnam-do, South Korea).

According to the abstract* released by the U.S. Patent & Trademark Office: "Provided is a substrate processing apparatus including a chamber having a processing space therein, a supporting unit arranged in the processing space, having a substrate located th...