US Patent Issued to SEMES on March 31 for "Fluid supply device and wafer cleaning apparatus using the same" (South Korean Inventors)

ALEXANDRIA, Va., March 31 -- United States Patent no. 12,589,414, issued on March 31, was assigned to SEMES Co. LTD. (Cheonan-si, South Korea).

"Fluid supply device and wafer cleaning apparatus using the same" was invented by Dong Hee Son (Hwaseong-si, South Korea), Seong Soo Lee (Suwon-si, South Korea), Jeong Bin Lee (Hwaseong-si, South Korea) and Sun Mi Kim (Yeongam-gun, South Korea).

According to the abstract* released by the U.S. Patent & Trademark Office: "A fluid supply device and a wafer cleaning apparatus using the same are proposed. The fluid supply device is improved to minimize occurrence of particles generated in an operational process in order to reduce contamination of a wafer. The fluid supply device includes a supply tube ...