US Patent Issued to Semes on March 3 for "Buffer unit and substrate treating apparatus including the same" (South Korean Inventors)

ALEXANDRIA, Va., March 3 -- United States Patent no. 12,566,387, issued on March 3, was assigned to Semes Co. LTD. (Cheonan-si, South Korea).

"Buffer unit and substrate treating apparatus including the same" was invented by Jong Kook Bae (Pyeongtaek-si, South Korea), Tae Won Yun (Namwon-si, South Korea), Chang Ho Kim (Osan-si, South Korea), Hyun Yang Jeong (Hwaseong-si, South Korea) and Sung Hun Eom (Hwaseong-si, South Korea).

According to the abstract* released by the U.S. Patent & Trademark Office: "Disclosed are a buffer unit, in which a plurality of support plates is stacked in a vertical direction and a connection block is provided between the plurality of support plates to prevent vibration generated at the lower end of the support ...