US Patent Issued to Semes on March 3 for "Apparatus for treating substrate including first substrate treating apparatus and transfer system" (South Korean Inventors)

ALEXANDRIA, Va., March 3 -- United States Patent no. 12,566,378, issued on March 3, was assigned to Semes Co. LTD. (Cheonan-si, South Korea).

"Apparatus for treating substrate including first substrate treating apparatus and transfer system" was invented by Sung-Gyu Lee (Cheonan-si, South Korea), Jung-Hyun Lee (Cheonan-si, South Korea), Hye Bin Baek (Incheon, South Korea), Dae Woon Lee (Cheonan-si, South Korea) and Dongwoon Park (Seoul, South Korea).

According to the abstract* released by the U.S. Patent & Trademark Office: "Disclosed is an apparatus for treating a substrate, which includes: a first unit configured to perform a coating process of forming a film on a substrate; a transfer unit including a transfer robot transferring a subs...