ALEXANDRIA, Va., March 3 -- United States Patent no. 12,567,570, issued on March 3, was assigned to SEMES Co. LTD (Chungcheongnam-Do, South Korea).
"Apparatus for treating substrate and method for treating substrate" was invented by Chang Mok Kim (Hwaseong-si, South Korea).
According to the abstract* released by the U.S. Patent & Trademark Office: "Disclosed is an apparatus for treating a substrate. The substrate treating apparatus may include a chamber for generating plasma in a treating space and treating a substrate using the plasma, and a measurement unit for monitoring light emitted from the plasma of the treating space, in which the measurement unit may include a light collection unit for collecting the light passing through a view ...