US Patent Issued to Semes on March 17 for "Apparatus for treating substrate and method for measuring degree of wear of consumable component" (South Korean Inventor)

ALEXANDRIA, Va., March 17 -- United States Patent no. 12,580,165, issued on March 17, was assigned to Semes Co. LTD. (Cheonan-si, South Korea).

"Apparatus for treating substrate and method for measuring degree of wear of consumable component" was invented by Chul Ho Won (Cheonan-si, South Korea).

According to the abstract* released by the U.S. Patent & Trademark Office: "An apparatus for treating a substrate includes a process chamber having a process space, a support unit that supports the substrate in the process space, a lift pin module having a lift pin that moves a consumable component on the support unit in an up/down direction, and a measurement unit that measures a degree of wear of the consumable component and has a light receivi...