US Patent Issued to SEMES on June 23 for "Chemical liquid supply module and substrate treating apparatus including the same" (South Korean Inventors)

ALEXANDRIA, Va., July 15 -- United States Patent no. 12,663,187, issued on June 23, was assigned to SEMES Co. LTD. (Chungcheongnam-do, South Korea).

"Chemical liquid supply module and substrate treating apparatus including the same" was invented by Dogyeong Ha (Chungcheongnam-do, South Korea) and Jaewon Kim (Chungcheongnam-do, South Korea).

According to the abstract* released by the U.S. Patent & Trademark Office: "Disclosed are a chemical liquid supply module, and a substrate treating apparatus including the same. The chemical liquid supply module includes: a chemical liquid tank having a receiving space defined therein capable of receiving therein chemical liquid; a chemical liquid circulating line for supplying the chemical liquid cont...