US Patent Issued to Semes on June 16 for "Substrate treating apparatus and substrate treating method" (South Korean Inventors)

ALEXANDRIA, Va., June 16 -- United States Patent no. 12,660,535, issued on June 16, was assigned to Semes Co. LTD (Cheonan-si, South Korea).

"Substrate treating apparatus and substrate treating method" was invented by Won Sik Son (Yongin-si, South Korea), Hyun Yoon (Hwaseong-si, South Korea), Hyo Won Yang (Seoul, South Korea), Ji Hoon Jeong (Hwaseong-si, South Korea), Young Dae Chung (Incheon, South Korea) and In Ki Jung (Hwaseong-si, South Korea).

According to the abstract* released by the U.S. Patent & Trademark Office: "The present invention provides a substrate treating method of treating a substrate including a plurality of cells, the substrate treating method including: a liquid treating operation of supplying a treatment liquid to ...