ALEXANDRIA, Va., July 7 -- United States Patent no. 12,677,623, issued on July 7, was assigned to SEMES Co. LTD (Chungcheongnam-Do, South Korea).
"Substrate processing apparatus" was invented by Sang Min Lee (Seoul, South Korea), Jong Doo Lee (Cheonan-si, South Korea) and Ju Yeon Song (Sokcho-si, South Korea).
According to the abstract* released by the U.S. Patent & Trademark Office: "Disclosed is a manufacturing method of a semiconductor device. The manufacturing method may include: a closing operation of seating a substrate on a support member provided in a chamber, and closing the chamber to seal a treating space provided by the chamber; a clamping operation of clamping the chamber by moving a clamping body in a direction facing the ch...