US Patent Issued to SEMES on July 7 for "Substrate processing apparatus" (South Korean Inventors)

ALEXANDRIA, Va., July 7 -- United States Patent no. 12,673,339, issued on July 7, was assigned to SEMES Co. LTD. (Chungcheongnam-Do, South Korea).

"Substrate processing apparatus" was invented by Bu Young Jung (Chungcheongnam-do, South Korea), Ju Hwan Lee (Chungcheongnam-do, South Korea) and Hyun Woo Bae (Chungcheongnam-do, South Korea).

According to the abstract* released by the U.S. Patent & Trademark Office: "A substrate processing apparatus includes a first supply pipe supplying a first chemical liquid to a substrate, a second supply pipe, spaced apart from the first supply pipe, and supplying a second chemical liquid to the substrate, and a recovery pipe connected to the first supply pipe to collect the first chemical liquid, and dis...