US Patent Issued to Semes on July 7 for "Device for holding a substrate, method of holding a substrate, and apparatus for processing a substrate" (South Korean Inventors)

ALEXANDRIA, Va., July 7 -- United States Patent no. 12,677,633, issued on July 7, was assigned to Semes Co. Ltd. (Cheonan-si, South Korea).

"Device for holding a substrate, method of holding a substrate, and apparatus for processing a substrate" was invented by Kyungsik Shin (Asan-si, South Korea), Seunghwan Lee (Cheonan-si, South Korea) and Kyoungdon Lee (Cheonan-si, South Korea).

According to the abstract* released by the U.S. Patent & Trademark Office: "An apparatus for processing a substrate may include a substrate holding part configured to maintain and support a substrate, a substrate transfer part configured to load the substrate onto the substrate holding part and to unload the substrate from the substrate holding part, and a subs...