US Patent Issued to SEMES on July 28 for "Heating unit and substrate treating apparatus including the same" (South Korean Inventors)

ALEXANDRIA, Va., July 28 -- United States Patent no. 12,696,713, issued on July 28, was assigned to SEMES Co. LTD. (Chungcheongnam-do, South Korea).

"Heating unit and substrate treating apparatus including the same" was invented by Dong Min Choi (Chungcheongnam-do, South Korea) and Hye Ji Kim (Gyeongsangbuk-do, South Korea).

According to the abstract* released by the U.S. Patent & Trademark Office: "The present disclosure provides a heating unit capable of using a bush with holes and a substrate treating apparatus including the same. An apparatus for treating a substrate, includes a heating unit including a heating plate and configured to heat the substrate, a cooling unit configured to cool the substrate, and a transfer unit configured t...