US Patent Issued to SEMES on July 28 for "Apparatus and method for processing substrate" (South Korean Inventors)

ALEXANDRIA, Va., July 28 -- United States Patent no. 12,693,598, issued on July 28, was assigned to SEMES Co. LTD. (Chungcheongnam-do, South Korea).

"Apparatus and method for processing substrate" was invented by Hae Won Choi (Daejeon, South Korea), Joon Ho Won (Gyeonggi-do, South Korea), Koriakin Anton (Chungcheongnam-do, South Korea), Ki Hoon Choi (Chungcheongnam-do, South Korea), Eung Su Kim (Gyeonggi-do, South Korea), Pil Kyun Heo (Gyeonggi-do, South Korea), Min Woo Kim (Seoul, South Korea), Jin Yeong Sung (Gyeonggi-do, South Korea) and Hyo Soo Kim (Gyeonggi-do, South Korea).

According to the abstract* released by the U.S. Patent & Trademark Office: "There are provided an apparatus and a method for providing a substrate, which can sup...