US Patent Issued to SEMES on July 21 for "Substrate inspecting unit and substrate treating apparatus including the same" (South Korean Inventor)

ALEXANDRIA, Va., July 21 -- United States Patent no. 12,688,573, issued on July 21, was assigned to SEMES Co. LTD. (Chungcheongnam-do, South Korea).

"Substrate inspecting unit and substrate treating apparatus including the same" was invented by Chul Woo Kim (Chungcheongnam-do, South Korea).

According to the abstract* released by the U.S. Patent & Trademark Office: "Provided are a substrate inspecting unit capable of monitoring line defects or a bunch of spots formed on a substrate, and a substrate processing apparatus including the same. The substrate processing apparatus comprises a process processing unit for supporting a substrate; an inkjet head unit for discharging a droplet on the substrate while moving in a first direction and a se...