ALEXANDRIA, Va., July 14 -- United States Patent no. 12,678,971, issued on July 14, was assigned to SEMES Co. LTD. (Cheonan-si, South Korea).
"System and method for transferring substrate" was invented by Myeong Gyu Shin (Cheonan-si, South Korea).
According to the abstract* released by the U.S. Patent & Trademark Office: "The present invention relates to a substrate transfer system and method enabling a direction of a substrate or the order of substrates to be maintained even when the substrate is swing-moved and transferred by a robot transportation device, in particularly, the substrate transfer system may include: a robot transportation device that transfers at least one substrate using at least one swing-movable transport arm; and a c...