US Patent Issued to SEMES on July 14 for "Auto teaching apparatus including test substrate and auto teaching method using distance measuring sensor" (South Korean Inventors)

ALEXANDRIA, Va., July 14 -- United States Patent no. 12,685,073, issued on July 14, was assigned to SEMES Co. LTD. (Chungcheongnam-Do, South Korea).

"Auto teaching apparatus including test substrate and auto teaching method using distance measuring sensor" was invented by Sung Hyuk Jung (Chungcheongnam-do, South Korea) and Jin Woo Sim (Chungcheongnam-do, South Korea).

According to the abstract* released by the U.S. Patent & Trademark Office: "The present disclosure may provide an auto-teaching method and apparatus using a distance measuring sensor a semiconductor manufacturing facility having a transfer robot including the same, and a substrate processing apparatus including a test substrate according to an embodiment of the present discl...