ALEXANDRIA, Va., Feb. 24 -- United States Patent no. 12,564,000, issued on Feb. 24, was assigned to Semes Co. Ltd. (Cheonan-si, South Korea).
"Apparatus and method for treating a substrate" was invented by Kun Hee Park (Gwangju, South Korea), Young Joon Han (Cheonan-si, South Korea), Cheol Hwan Jeong (Pyeongtaek-si, South Korea), Dae Hun Kim (Pyeongtaek-si, South Korea), Seong Hyun Yun (Seongnam-si, South Korea), Ye Jin Choi (Seoul, South Korea), Eun Hyeok Choi (Cheonan-si, South Korea), Tae Ho Kang (Suwon-si, South Korea) and Young Jin Kim (Cheonan-si, South Korea).
According to the abstract* released by the U.S. Patent & Trademark Office: "An apparatus for treating a substrate of the present invention includes a buffer unit, an inversio...