US Patent Issued to SEMES on Aug. 4 for "Sealing member, fluid supplying device including sealing member, and substrate processing apparatus including fluid supplying device" (South Korean Inventors)

ALEXANDRIA, Va., Aug. 5 -- United States Patent no. 12,698,852, issued on Aug. 4, was assigned to SEMES Co. LTD. (Cheonan-si, South Korea).

"Sealing member, fluid supplying device including sealing member, and substrate processing apparatus including fluid supplying device" was invented by Joon Hee Lee (Cheonan-si, South Korea), Wook Sang Jang (Cheonan-si, South Korea) and Dong Uk Kim (Cheonan-si, South Korea).

According to the abstract* released by the U.S. Patent & Trademark Office: "Proposed are a sealing member that prevents fluid leakage even in a cryogenic environment, a fluid supplying device including the sealing member, and a substrate processing apparatus including the fluid supplying device. A sealing member according to an emb...