ALEXANDRIA, Va., Aug. 5 -- United States Patent no. 12,698,599, issued on Aug. 4, was assigned to Semes Co. LTD. (Cheonan-si, South Korea).
"Safety fence, transfer device including a safety fence and apparatus for processing a substrate including a safety fence" was invented by Eunho Seo (Cheonan-si, South Korea), Sangpyo Jun (Cheonan-si, South Korea), Sunghyup Baek (Daejeon, South Korea), Hyochul Kim (Sejong-si, South Korea) and Inkwang Lee (Cheonan-si, South Korea).
According to the abstract* released by the U.S. Patent & Trademark Office: "A transfer device may include a transfer part including transfer rails installed on a ceiling of a manufacturing line for an integrated circuit device and a transfer vehicle running along the transfe...