US Patent Issued to Semes on Aug. 4 for "Heating unit, substrate treating apparatus including the same, method of controlling heating unit" (South Korean Inventors)

ALEXANDRIA, Va., Aug. 5 -- United States Patent no. 12,701,952, issued on Aug. 4, was assigned to Semes Co. Ltd. (Cheonan-si, South Korea).

"Heating unit, substrate treating apparatus including the same, method of controlling heating unit" was invented by Tae Sub Lee (Seoul, South Korea), Gyu Hyun Kim (Cheonan-si, South Korea), Sung Yong Lee (Yongin-si, South Korea) and Dong Hyuk Seo (Pyeongtaek-si, South Korea).

According to the abstract* released by the U.S. Patent & Trademark Office: "Provided is a heating unit including: a heating plate for heating a substrate; a heater installed in the heating plate; and a control unit for controlling the heater, in which wherein the heater includes: a first heater; and a second heater installed at a...